Semiconductors

Semiconductors Wafer Machinery (OEM & Retrofit)

  • PVD (Physical Vapor Deposition)
  • CVD (Chemical Vapor Deposition)
Model Phases Firing Mode Output Voltage Current Low Current High Highlights
MicroFUSION Three Phase Three phase Phase angle, Zero cross, Zero Cross Transformer Mode AC 24-690 VAC (CE), 24-600 VAC (UL), 45-65 Hz 8 400

MicroFUSION is an ultra-compact high performance digital SCR controller that adapts to the analog environment as well as the digital environment.

FUSION Single Phase (DC) Power Controller Single phase Phase angle DC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 45 1 080

24 - 600 Vac. A microprocessor-based DC SCR controller operating both analog and digital interfaces. A phase angle fired controller which linearly controls, with respect to the setpoint, the DC voltage, current, or true power applied to an electrical load. Control is achieved by means of a half controlled SCR bridge.

FUSION Three Phase (AC) Power Controller Three phase Phase angle, Zero cross, Burst AC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 50 1 200

24 - 600 Vac. A microprocessor-based SCR controller operating both analog and digital interfaces. A phase angle or zero cross fired SCR controller which linearly controls, with respect to the setpoint, the AC voltage, current, or true power applied to a three phase electrical load. The 3 phase controller can be ordered in either 2 or 3 leg control with 2 leg being limited to zero cross firing. Control is achieved for 3 leg by three pairs of inverse parallel SCRs or in 2 leg by 2 pairs of inverse parallel SCRs.

FUSION Three Phase (DC) Power Controller Three phase Phase angle DC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz* 60 1 400

24 - 600 Vac. A microprocessor-based DC SCR controller operating both analog and digital interfaces. A phase angle-fired controller which linearly controls, with respect to the setpoint, the DC voltage, current, or true power applied to an electrical load. Control is achieved by means of a six SCR bridge with freewheeling diode.

1029D Single phase Phase angle AC 120, 240, 480, 575* 50 1 000

120 to 575 Vac. Analog SCR Controller. Higher current ratings than our solid state relay models. Features include: current limiting, shorted SCR detection, over-current trip, metering outputs, user selectable feedback modes.

Compact FUSION Three Phase Power Controller Three phase Phase angle, Zero cross, Burst AC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 10 160

24 - 600 Vac. A microprocessor-based SCR controller operating both analog and digital interfaces. Can be ordered in either 2 or 3 leg control with 2 leg being limited to zero cross firing. Output is controlled linearly with respect to command signal and can be set to the average or RMS value of the voltage or current, as well as true instantaneous power or external feedback.

1600 (Multi-zone) Power Controller Single phase Phase angle, Zero cross AC 120, 240, 480, 575* 10 70

120 to 575 Vac. Multi-zone SCR Controller. Accepts most commands. Allows mixing of line voltages and load currents for multiple zones in a small footprint.

Compact FUSION - Single Phase Power Controller Single phase Phase angle, Zero cross, Burst AC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 10 160

24 - 600 Vac. A microprocessor-based SCR controller, operating with both analog and digital interfaces. Output is controlled linearly with respect to command signal and can be set to the average or RMS value of the voltage or current, as well as true instantaneous power or external feedback.

FUSION Single Phase (AC) Power Controller Single phase Phase angle, Zero cross, Burst AC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 50 1 200

24 - 600 Vac. A microprocessor-based SCR controller operating both analog and digital interfaces. A phase angle or zero cross fired controller which linearly controls, with respect to the setpoint, the AC voltage, current, or true power applied to an electrical load. Control is achieved by means of a pair of inverse parallel SCRs.