Semiconductors

Our microFUSION and custom power controllers can be found in OEM equipment of almost every Semiconductor fab in the world.  Our unparalled power control capability enables the most advanced proces as the industry moves toward 1nm production and beyond.

  • PVD (Physical Vapor Deposition)
  • CVD (Chemical Vapor Deposition)
  • MDP (Metal Deposition)
  • RTP (Rapid Thermal Procesing)
  • ALD (Atomic Layer Deposition)
  • EPI 
  • Etch
Model Phases Firing Mode Output Voltage Current Low Current High Highlights
MicroFUSION Single Phase Single phase Phase angle, Zero cross, Zero Cross Transformer Mode, Fast Zero Cross AC 24-690 VAC (CE), 24-600 VAC (UL), 45-65 Hz 8 400

MicroFUSION is an ultra-compact high performance digital SCR controller that adapts to the analog environment as well as the digital environment. 
FUSION Single Phase (AC) Power Controller 500 - 1200A Single phase Phase angle, Zero cross, Fast Zero Cross AC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 500 1 200

24 - 600 Vac. A microprocessor-based SCR controller operating both analog and digital interfaces. A phase angle or zero cross fired controller which linearly controls, with respect to the setpoint, the AC voltage, current, or true power applied to an electrical load. Control is achieved by means of a pair of inverse parallel SCRs.
FUSION Single Phase (DC) Power Controller Single phase Phase angle DC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz 45 1 080

24 - 600 Vac. A microprocessor-based DC SCR controller operating both analog and digital interfaces. A phase angle fired controller which linearly controls, with respect to the setpoint, the DC voltage, current, or true power applied to an electrical load. Control is achieved by means of a half controlled SCR bridge.
FUSION Three Phase (DC) Power Controller Three phase Phase angle DC Auto-Ranging Line Voltage 24-600 VAC, 45-65 Hz* 60 1 400

24 - 600 Vac. A microprocessor-based DC SCR controller operating both analog and digital interfaces. A phase angle-fired controller which linearly controls, with respect to the setpoint, the DC voltage, current, or true power applied to an electrical load. Control is achieved by means of a six SCR bridge with freewheeling diode.